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TF5xxx - Motion · 0 次阅读

ID 120655

Programmed difference too small to heterodyne automatically the Contour Mode.

Description

Response

Class

1

Solution

Class

1

Parameter

%1:

Current value [0.1 µm or 0.0001°]

%2:

Limit value [0.1 µm or 0.0001°]

Error type

1, Error message from NC program.