Tiles
Tiles | APS4244-1x00 |
|---|---|
Version | Standard |
Maximum angle of rotation C axis [°] | ±5 |
Maximum position resolution [µm; °] | 1 X, Y, Z; 0.001 A, B, C |
XPlanar | Planar motor system · 0 次阅读
XPlanar | Planar motor system · 0 次阅读
Tiles | APS4244-1x00 |
|---|---|
Version | Standard |
Maximum angle of rotation C axis [°] | ±5 |
Maximum position resolution [µm; °] | 1 X, Y, Z; 0.001 A, B, C |